Improvement of polysilicon oxide by growing on polished polysilicon film

IEEE Electron Device Letters

Volumn 18, Issue 6, 1997, Pages 270-271

  Lei, Tan Fu ^a   Cheng, Juing Yi ^a   Shiau, Shyh Yin ^a   Chao, Tien Sheng ^b   Lai, Chao Sung ^a  

^a NATIONAL CHIAO TUNG UNIVERSITY   (Taiwan)

^b NATIONAL NANO DEVICE LABORATORIES   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC BREAKDOWN OF SOLIDS; LEAKAGE CURRENTS; OXIDES; PLASTIC FILMS;

INTERPOLYSILICON OXIDE; POLYSILICON FILMS;

SEMICONDUCTING FILMS;

EID: 0031167987     PISSN: 07413106     EISSN: None     Source Type: Journal    
DOI: 10.1109/55.585353     Document Type: Article

References (7)

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