MEMCAD capacitance calculations for mechanically deformed square diaphragm and beam microstructures

Transducers '91

Volumn , Issue , 1991, Pages 494-497

  Johnson, Brian P ^a   Kim, Songmin ^a   Senturia, Stephen D ^a   White, Jacob ^a  

^a NONE

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER AIDED DESIGN; COMPUTER SIMULATION; DATABASE SYSTEMS; DIAPHRAGMS; ELECTROMECHANICAL DEVICES - MICROELECTROMECHANICAL;

BEAM MICROSTRUCTURE CAPACITANCE; DIAPHRAGM CAPACITANCE; SOFTWARE PACKAGE MEMCAD; SQUARE DIAPHRAGM;

SENSORS;

EID: 0026370569     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (17)