QUARTZ CRYSTAL MICROMECHANICAL DEVICES.

Volumn , Issue , 1985, Pages 113-116

  Ueda, Toshitsugu ^a   Kohsaka, Fusao ^a   Yamazaki, Daisuke ^a   Iino, Toshio ^a  

^a Yokogawa Research Institute Corp   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

LITHOGRAPHY - APPLICATIONS;

ANISOTROPIC ETCHING; MICROMECHANICAL DEVICES; PHOTOLITHOGRAPHY;

QUARTZ;

EID: 0022307844     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)