Bi- and three-dimensional prediction of etching shapes in quartz micromachined structures

Proceedings of the Annual Frequency Control Symposium

Volumn , Issue , 1993, Pages 397-406

  Tellier, C R ^a   Leblois, T G ^a  

^a Centre National de la Recherche Scientifique   (France)

Author keywords

[No Author keywords available]

Indexed keywords

AMMONIUM COMPOUNDS; ANISOTROPY; COMPUTER GRAPHICS; COMPUTER SIMULATION; CRYSTALS; DISSOLUTION; ETCHING; MATHEMATICAL MODELS; MICROMACHINING; TENSORS;

AMMONIUM BIFLUORIDE SOLUTION; DISSOLUTION SLOWNESS SURFACE; ETCHING SHAPES; QUARTZ MICROMACHINED STRUCTURES; TENSORIAL MODEL;

QUARTZ;

EID: 0027838101     PISSN: 01616404     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (11)