Nitrogen doped germania glasses with enhanced optical and mechanical properties

Journal of the Electrochemical Society

Volumn 144, Issue 6, 1997, Pages 2137-2142

  Storgaard Larsen, T ^a   Poulsen, C V ^b,d   Leistiko, O ^c  

^a Bruel & Kjaer Danmark   (Denmark)

^b UNIVERSITY OF SOUTHAMPTON   (United Kingdom)

^c TECHNICAL UNIVERSITY OF DENMARK   (Denmark)

^d Microelectronics Centre

Author keywords

[No Author keywords available]

Indexed keywords

AMMONIA; ANNEALING; CHEMICAL VAPOR DEPOSITION; COMPOSITION EFFECTS; DOPING (ADDITIVES); GERMANIUM; NITROGEN; OPTICAL WAVEGUIDES; PLASMA APPLICATIONS; REFRACTIVE INDEX; SILICON WAFERS; STRESSES;

PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION;

PHOTOSENSITIVE GLASS;

EID: 0031164182     PISSN: 00134651     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.1837752     Document Type: Article

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