Fabrication of a diffusion cooled superconducting hot electron bolometer for THZ mixing applications

IEEE Transactions on Applied Superconductivity

Volumn 7, Issue 2 PART 3, 1997, Pages 3560-3563

  Bumble, Bruce ^a   Leduc, Henry G ^a  

^a CALIFORNIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANTENNAS; BANDWIDTH; COOLING; DIFFUSION IN SOLIDS; ELECTRON BEAM LITHOGRAPHY; GOLD; NIOBIUM; SUPERCONDUCTING FILMS;

HOT ELECTRON BOLOMETERS;

BOLOMETERS;

EID: 0031163616     PISSN: 10518223     EISSN: None     Source Type: Journal    
DOI: 10.1109/77.622167     Document Type: Article

References (8)

1. D.E.Prober "Superconducting terahertz mixer using a transition edge microbolometer" Appl. Phys. Lett. Vol. 62 (17) pp. 2119-2121 April (1993).
2. A. Skalare W.R. McGrath B. Bumble H.G. LeDuc P.J. Burke A.A. Verheijen R.J. Schoelkoph and D.E. Prober "Large bandwidth and low noise in a diffusion-cooled hot electron bolometer mixer" Appl. Phys. Lett. Vol. 68 (11) pp. 1558-1560 March (1996).
3. P.J. Burke R.J. Schoelkopf D.E. Prober A. Skalare W.R. McGrath B. Bumble and H.G. LeDuc "Length scaling of bandwidth and noise in hot-electron superconducting mixers" Appl. Phys. Lett. Vol. 68 (23) pp. 3344-3346 June (1996).
4. S. Mackie and S.P. Beaumont "Materials and Processes for Nanometer Lithography" Solid State Technol 28(8) 117 (1985).
5. M.Rooks S. Wind P. McEuen and D.E. Prober "Fabrication of 30-nmscale structures for electron transport studies using a polymethymethacrylate bilayer resist" J Vac. Set. Technol. B 5 (1) Jan/Feb 1987.
6. A "grassy" residue appears when non-volatile particles are sputterred from chamber surfaces and land on the substrate surface thus acting as micro-masks during the polymer etch.
7. A. Skalare W.R. McGrath B. Bumble H.G. LeDuc "Receiver measurements at 1267 GHz using a diffusion-cooled superconducting transition-edge bolometer" (this conference issue).
8. B.S. Karasik M.C. Gaidis W.R. McGrath B. Bumble H.G. Le Duc "A low-noise 2.5 THz superconductive Nb hot electron mixer" (this conference issue).