MATERIALS AND PROCESSES FOR NANOMETER LITHOGRAPHY.

Solid State Technology

Volumn 28, Issue 8, 1985, Pages 117-122

  Mackie, S ^a   Beaumont, S P ^a  

^a UNIVERSITY OF GLASGOW   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRON BEAMS - APPLICATIONS;

NANOLITHOGRAPHY; NANOMETER LITHOGRAPHY; ULTRASMALL STRUCTURES;

LITHOGRAPHY;

EID: 0022103912     PISSN: 0038111X     EISSN: None     Source Type: Trade Journal    
DOI: None     Document Type: Article

References (14)