2-Achsen Si-neigungssensor: Simulation und realisierung

VDI Berichte

Volumn , Issue 1255, 1996, Pages 83-91

  Mescheder, U ^a   Majer, S ^a   Keller, R ^a  

^a NONE

Author keywords

[No Author keywords available]

Indexed keywords

EID: 30244431628     PISSN: 00835560     EISSN: None     Source Type: Book Series    
DOI: None     Document Type: Article

References (6)

1. Fidelak, M., Konduktometrische Neigungssensoren, SENSOR Report, 1992, 5, 34f.
2. Ogorlec, Z. & Radic V. A photoelectrical tilt sensor, Sensors and Actuators, 1989, 19, 95-104.
3. Crazzolara, H. et al, Piezoresistive accelerometer with overload protection and low crossensivity, Sensors and Actuators, 1993, A39, 201-207.
4. Pfann, W.G. & Thurston, R.N., Semiconducting stress transducers utilizing the transverse and shear piezoresistance effects, Journal of Applied Physics, V32, 10 , 1961, 2008-2019.
5. Majer, S. and Mescheder, U.: "Konzept eines 2-Achsen Silizium Neigungssensors", Proceedings der 2. Chemnitzer Fachtagung Mikrosystemtechnik, 1995
6. Majer, S, and Mescheder, U. "Simulation supported design of micromechanical sensors" in R.A. Adey, A. Lahrmann, C. Leßmöllmann (Editors) "Simulation and Design of Microsystems and Microstructures", Computationals Mechanics Publication, Southampton, Boston, 1995