Pzt thin film preparation on pt-ti electrode by rf sputtering

Japanese Journal of Applied Physics

Volumn 30, Issue 9S, 1991, Pages 2152-2154

  Abe, Kazuhide ^a   Tomita, Hiroshi ^a   Toyoda, Hiroshi ^a   Imai, Motomasa ^a   Yokote, Yukari ^a  

^a TOSHIBA CORPORATION   (Japan)

Author keywords

Ferroelectric thin film; Lower electrode film; Pt Ti alloy; PZT

Indexed keywords

PLATINUM TITANIUM ALLOYS; SPUTTERING;

LEAD TITANATE ZIRCONATE; LOWER ELECTRODE FILM; PZT THIN FILMS;

FERROELECTRIC MATERIALS;

EID: 0026224774     PISSN: 00214922     EISSN: 13474065     Source Type: Journal    
DOI: 10.1143/JJAP.30.2152     Document Type: Article

References (1)

1. J. F. Scott and C. P. Araujo: Science 246 (1989) 1400.