Ferroelectric lead zirconate titanate thin films by radio frequency magnetron sputtering

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 10, Issue 1, 1992, Pages 69-74

  Ramakrishnan, E S ^a   Howng, Wei Yean ^a  

^a MOTOROLA INC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 33645832453     PISSN: 07342101     EISSN: 15208559     Source Type: Journal    
DOI: 10.1116/1.578152     Document Type: Article

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