Growth and investigation of the big area Lely-grown substrates

Materials Science and Engineering B

Volumn 46, Issue 1-3, 1997, Pages 291-295

  Lebedev, Alexander A ^a   Tregubova, Alia S ^a   Chelnokov, Valentin E ^a   Scheglov, Mikhail P ^a   Glagovskii, AL'Fred A ^b  

^a IOFFE INSTITUTE   (Russian Federation)

^b Compozit ^*  (Russian Federation)

Author keywords

Lely methods; SiC crystals; Substrates

Indexed keywords

CRYSTAL GROWTH; DENSITY (SPECIFIC GRAVITY); DISLOCATIONS (CRYSTALS); SUBSTRATES; SURFACE STRUCTURE; X RAY CRYSTALLOGRAPHY;

LELY METHODS; X RAY TOPOGRAPHY;

SILICON CARBIDE;

EID: 0031124312     PISSN: 09215107     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0921-5107(96)01996-4     Document Type: Article

References (12)

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