SCOPUS 정보 검색 플랫폼

Volumn 46, Issue 1-3, 1997, Pages 300-303

Growth and investigation of epitaxial 6H-SiC layers obtained by CVD on Lely-grown substrates

Author keywords

6H SiC substrates; Lely substrate; SiC epilayers

Indexed keywords

CHEMICAL VAPOR DEPOSITION; CRYSTAL STRUCTURE; EPITAXIAL GROWTH; ETCHING; SCHOTTKY BARRIER DIODES; SILICON CARBIDE; SUBLIMATION; SUBSTRATES;

LELY SUBSTRATES;

HETEROJUNCTIONS;

EID: 0000935023 PISSN: 09215107 EISSN: None Source Type: Journal
DOI: 10.1016/S0921-5107(97)00005-6 Document Type: Article

Times cited : (7)

References (14)

1
- 33847510976
- Yu.M. Tairov and V.F. Tsvetkov, J. Crystal Growth, 43 (1978) 209-212.
- (1978) J. Crystal Growth , vol.43 , pp. 209-212
- Tairov, Yu.M.¹ Tsvetkov, V.F.²

2
- 0042746016
- A.N. Andreev, A.S. Tregubova, M.P. Shcheglov, V.P. Rastegaev, S.I. Dorozhkin and V.E. Chelnokov, Fiz. Tekhn. Poluprovodn., 29 (1995) 10.
- (1995) Fiz. Tekhn. Poluprovodn. , vol.29 , pp. 10
- Andreev, A.N.¹ Tregubova, A.S.² Shcheglov, M.P.³ Rastegaev, V.P.⁴ Dorozhkin, S.I.⁵ Chelnokov, V.E.⁶

3
- 0001093831
- J.A. Lely, Ber. Dt. Keram. Ges., 55 (1955) 229-231.
- (1955) Ber. Dt. Keram. Ges. , vol.55 , pp. 229-231
- Lely, J.A.¹

4
- 0042746008
- in press
- A.A. Lebedev, A.S. Tregubova, V.E. Chelnokov, M.P. Sceglov and A.A. Glagovskii, Proc. E-MRS 1996 Spring Mtg. (in press).
- Proc. E-MRS 1996 Spring Mtg.
- Lebedev, A.A.¹ Tregubova, A.S.² Chelnokov, V.E.³ Sceglov, M.P.⁴ Glagovskii, A.A.⁵

5
- 36449003498
- P.G. Neudeck, D.J. Larkin, J.A. Powel and L.G. Matus, Appl. Phys. Lett., 64 (1994) 1386-1388.
- (1994) Appl. Phys. Lett. , vol.64 , pp. 1386-1388
- Neudeck, P.G.¹ Larkin, D.J.² Powel, J.A.³ Matus, L.G.⁴

6
- 0001019588
- O. Kordina, J.P. Bergman, A. Henry, E. Janzen, S. Savarge, J. Andre, L.P. Ramberg, U. Lindefelt, W. Hermansson and K. Bergman, Appl. Phys. Lett., 67 (1995) 1561-1563.
- (1995) Appl. Phys. Lett. , vol.67 , pp. 1561-1563
- Kordina, O.¹ Bergman, J.P.² Henry, A.³ Janzen, E.⁴ Savarge, S.⁵ Andre, J.⁶ Ramberg, L.P.⁷ Lindefelt, U.⁸ Hermansson, W.⁹ Bergman, K.¹⁰

7
- 0027577630
- H. Matsunami, Phys. B., V185 (1993) 65-74.
- (1993) Phys. B. , vol.V185 , pp. 65-74
- Matsunami, H.¹

8
- 0026765291
- M.M. Anikin, A.A. Lebedev, S.N. Pyatko, A.M. Strel'chuk and A.L. Syrkin, Mater. Sci. Eng., B11 (1992) 113-115.
- (1992) Mater. Sci. Eng. , vol.B11 , pp. 113-115
- Anikin, M.M.¹ Lebedev, A.A.² Pyatko, S.N.³ Strel'chuk, A.M.⁴ Syrkin, A.L.⁵

9
- 0001264702
- C. Hallin, A.S. Bakin, F. Owman, P. Martensson, O. Kordina and E. Janzen, Inst. Phys. Conf. Ser., N142 (1996) 613-616.
- (1996) Inst. Phys. Conf. Ser. , vol.N142 , pp. 613-616
- Hallin, C.¹ Bakin, A.S.² Owman, F.³ Martensson, P.⁴ Kordina, O.⁵ Janzen, E.⁶

10
- 21544455034
- J.A. Powell, J.B. Petit, J.H. Edgar, I.G. Jenkins, L.G. Matus, J.W. Yang, P. Pirous, W.J. Choyke, L. Cherman and M. Yoganthan, Appl. Phys. Lett., 59 (1991) 333-335.
- (1991) Appl. Phys. Lett. , vol.59 , pp. 333-335
- Powell, J.A.¹ Petit, J.B.² Edgar, J.H.³ Jenkins, I.G.⁴ Matus, L.G.⁵ Yang, J.W.⁶ Pirous, P.⁷ Choyke, W.J.⁸ Cherman, L.⁹ Yoganthan, M.¹⁰

11
- 0026139037
- N4
- J.C. Wang and R.F. Davik, J. Elektron Mat., V20, N4 (1991) 289-294.
- (1991) J. Elektron Mat. , vol.V20 , pp. 289-294
- Wang, J.C.¹ Davik, R.F.²

12
- 0043247045
- N3 (in Russian)
- P.A. Ivanov, V.V. Zelenin, A.M. Danishevskii, S.M. Starobinetz and V.E. Chelnokov. Pisma v GTF V21, N3 (1995) 1-9 (in Russian).
- (1995) Pisma v GTF , vol.V21 , pp. 1-9
- Ivanov, P.A.¹ Zelenin, V.V.² Danishevskii, A.M.³ Starobinetz, S.M.⁴ Chelnokov, V.E.⁵

13
- 0029184925
- A.L. Syrkin, A.N. Andreev, A.A. Lebedev, M.G. Rastegaeva and V.E. Chelnokov, Mater. Sci. Eng., B29 (1995) 198-201.
- (1995) Mater. Sci. Eng. , vol.B29 , pp. 198-201
- Syrkin, A.L.¹ Andreev, A.N.² Lebedev, A.A.³ Rastegaeva, M.G.⁴ Chelnokov, V.E.⁵

14
- 0008583477
- O. Kordina, C. Hallin, R.C. Glass, A. Henry and E. Janzen. Inst. Phys. Conf. Ser, 137 (1994) 41-44.
- (1994) Inst. Phys. Conf. Ser , vol.137 , pp. 41-44
- Kordina, O.¹ Hallin, C.² Glass, R.C.³ Henry, A.⁴ Janzen, E.⁵

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.