Applications of pulsed excimer laser deposition with a frozen nitrogen target to deposition of NbN and BN films

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 36, Issue 4 A, 1997, Pages 2267-2271

  Hiroshima, Yasushi ^a,c   Ishiguro, Takashi ^b   Esaki, Kotaro ^b  

^a Appl Laser Eng Research Institute   (Japan)

^b NAGAOKA UNIVERSITY OF TECHNOLOGY   (Japan)

^c KAWASAKI HEAVY INDUSTRIES LTD   (Japan)

Author keywords

BN film; Frozen nitrogen; NbN film; Nitride film; PLD; Pulsed laser deposition

Indexed keywords

BORON NITRIDE; FROZEN NITROGEN; NIOBIUM NITRIDE; NITRIDE FILMS; PULSED LASER DEPOSITION;

ABSORPTION SPECTROSCOPY; DEPOSITION; EXCIMER LASERS; FILM GROWTH; FILM PREPARATION; FOURIER TRANSFORM INFRARED SPECTROSCOPY; NITROGEN; PULSED LASER APPLICATIONS; SYNTHESIS (CHEMICAL); THIN FILMS; X RAY DIFFRACTION ANALYSIS; X RAY PHOTOELECTRON SPECTROSCOPY;

NITRIDES;

EID: 0031118958     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.36.2267     Document Type: Article

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