Real-time optical analysis and control of semiconductor epitaxy: Progress and opportunity

Solid State Communications

Volumn 101, Issue 2, 1997, Pages 85-92

  Aspnes, D E ^a  

^a NORTH CAROLINA STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALGORITHMS; CRYSTAL STRUCTURE; FEEDBACK CONTROL; OPTICAL SYSTEMS; REAL TIME SYSTEMS; SURFACES;

DIELECTRIC RESPONSE; REAL TIME OPTICAL ANALYSIS; SURFACE ANALYSIS;

SEMICONDUCTOR GROWTH;

EID: 0030826023     PISSN: 00381098     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0038-1098(96)00447-4     Document Type: Article

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