Investigations on porous silicon layers with regard to chemical microsensor applications

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 2779, Issue , 1996, Pages 275-280

  Schoening, M J ^a   Crott, M ^a   Ronkel, F ^a   Thust, M ^a   Schultze, J W ^a   Kordos, P ^a   Lueth, Hans ^a  

^a FORSCHUNGSZENTRUM JÜLICH   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL SENSORS; DIELECTRIC FILMS; ELECTROLYTES; PH SENSORS; PHOTOELECTRON SPECTROSCOPY; POROUS MATERIALS; SCANNING ELECTRON MICROSCOPY; SEMICONDUCTING SILICON;

CYCLIC VOLTAMETRY; MICROSENSORS;

INTELLIGENT MATERIALS;

EID: 0029696132     PISSN: 0277786X     EISSN: None     Source Type: None    
DOI: 10.1117/12.237125     Document Type: Conference Paper

References (17)