Integrated CMOS polysilicon coil-based micro-Pirani gauge with high heat transfer efficiency

Technical Digest - International Electron Devices Meeting

Volumn , Issue , 1994, Pages 135-138

  Swart, Nicholas R ^a   Nathan, Arokia ^a  

^a UNIVERSITY OF WATERLOO   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

HEAT TRANSFER; MICROMACHINING; PRESSURE GAGES; PRESSURE MEASUREMENT; THERMAL CONDUCTIVITY OF GASES;

MICRO PIRANI GAUGE; POLYSILICON;

CMOS INTEGRATED CIRCUITS;

EID: 0028737558     PISSN: 01631918     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)