Plasma immersion ion implantation for metallurgical and semiconductor research and development

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 120, Issue 1-4, 1996, Pages 270-281

  Ensinger, W ^a  

^a UNIVERSITY OF AUGSBURG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

METALLURGY; PLASMA APPLICATIONS; PLASMA SOURCES; SEMICONDUCTOR DOPING;

PLASMA IMMERSION ION IMPLANTATION; PLASMA SOURCE ION IMPLANTATION;

ION IMPLANTATION;

EID: 0030566555     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(96)00526-5     Document Type: Article

References (31)

1. J.R. Conrad and C. Forest, in: IEEE Int. Conf. on Plasma Science, Saskatoon, Canada, May 19-21, 1986 (IEEE, New York 1986) p. 28.
2. J.R. Conrad and T. Castagna, Bull. Am. Phys. Soc. 31 (1986) 1479.
3. J.R. Conrad, J. Appl. Phys. 62 (1987) 777.
4. J.R. Conrad, J.L. Radtke, R.A. Dodd, F.J. Worzala and N.C. Tran, J. Appl. Phys. 62 (1987) 4591.
5. J. Tendys, I.J. Donnelly, M.J. Kenny and J.T.A. Pollock, Appl. Phys. Lett. 53 (1988) 2143.
6. B. Mizuno, I. Nakayama, N. Aoi, M. Kubota and T. Komeda, Appl. Phys. Lett. 53 (1988) 2059.
7. W. Ensinger, J. Hartmann, J. Klein, P. Usedom, B. Stritzker and B. Rauschenbach, Mat. Res. Soc. Symp. Proc. 396 (1996) 521.
8. I.G. Brown, X. Godechot and K.M. Yu, Appl. Phys. Lett. 58 (1991) 1392.
9. G.A. Collins, R. Hutchings and J. Tendys, Mat. Sci. Eng. A139 (1991) 171.
10. R. Günzel, E. Wieser, E. Richter and J. Steffen, J. Vac. Sci. Technol. B12 (1994) 927.
11. K.C. Walter, J. Vac. Sci. Technol. B12 (1994) 945.
12. K.C. Walter, R.A. Dodd and J.R. Conrad, Nucl. Instr. and Meth. B 106 (1995) 522.
13. M. Samandi, B.A. Shedden, D.I. Smith, G.A. Collins, R. Hutchings and J. Tendys, Surf. Coat. Technol. 59 (1993) 261.
14. G.A. Collins, R. Hutchings, K.T. Short, J. Tendys, X. Li and M. Samandi, Surf. Coat. Technol. 74-75 (1995) 417.
15. X. Li, M. Samandi, D. Dunne, G.A. Collins, J. Tendys, K.T. Short and R. Hutchings, Surf. Coat. Technol. (1996), in press.
16. C. Blawert, F.-M. Knoop, A. Weisheit and B.L. Mordike, Surf. Coat. Technol., in press.
17. I.G. Brown, A. Anders, S. Anders, M.R. Dickinson, I.C. Ivanov, R.A. McGill, X.Y. Yao and K.M. Yu, Nucl. Instr. and Meth. B 80/81 (1993) 1281.
18. J.R. Conrad, R.A. Dodd, F.J. Worzala and X. Qiu, Surf. Coat. Technol. 36 (1988) 927.
19. J.N. Matossian, J. Vac. Sci. Technol. B12 (1994) 850.
20. W. Ensinger, J. Hartmann, H. Bender, R.W. Thomae, A. Königer, B. Stritzker and B. Rauschenbach, Surf. Coat. Technol., in press.
21. J. Hartmann, W. Ensinger, A. Königer, B. Stritzker and B. Rauschenbach, J. Vac. Sci. Technol., in press.
22. X.Y. Qian, N.W. Cheung, M.A. Lieberman, R. Brennan, M.I. Current and N. Jha, Nucl. Instr. and Meth. B 55 (1991) 898.
23. X.Y. Qian, N.W. Cheung, M.A. Lieberman, M.I. Current, P.K. Chu, W.L. Harrington, C.W. Magee and E.M. Botnick, Nucl. Instr. and Meth. B 55 (1991) 821.
24. T. Sheng, S.B. Felch, C.B. Cooper III, J. Vac. Sci. Technol. B12 (1994) 969.
25. S.B. Felch, T. Sheng, E. Ganin, K.K. Chan, D.L. Chapek, R.J. Matyi and J.R. Conrad, in: Ion Implantation Technology - 94, eds. S. Coffa, G. Ferla, F. Priolo, E. Rimini (Elsevier, Amsterdam, 1995) p. 981.
26. B. Mizuno, I. Nakayama, N. Shimizu, M. Kubota, K. Yano, in: Ion Implantation Technology - 94, eds. S. Coffa, G. Ferla, F. Priolo, E. Rimini (Elsevier, Amsterdam, 1995) p. 985.
27. I. Pintér, M. Ádám, Cs. Dücsö, N.Q. Khánh and I. Bársony, Proc. 10th Int. Colloquium on Plasma Processes CIP '95, June 1995, Antibes, in press.
28. N.Q. Khánh, I. Pintér, Cs. Dücsö, M. Ádám, E. Szilágyi, I. Bársony, M.A. El-Sherbiny and J. Gyulai, Nucl. Instr. and Meth. B 112 (1996) 259.
29. J.B. Liu, S.S.K. Iyer, C.M. Hu, N.W. Cheung, R. Gronsky, J. Min, P. Chu, Appl. Phys. Lett. 67 (1995) 2361.
30. J. Min, P.K. Chu, Y.C. Cheng, J.B. Liu, S. Im, S. Iyer and N.W. Cheung, Mat. Chem. Phys. 40 (1995) 219.
31. J.B. Liu, S.S.K. lyer, J. Min, P.K. Chu, R. Gronsky, C.M. Hu and N.W. Cheung, Proc. IEEE Int. SOI Conference, Oct. 1995, Tucson, Arizona, p. 167.