Apparatus for magnetron sputter coating and plasma immersion ion implantation

Materials Research Society Symposium - Proceedings

Volumn 396, Issue , 1996, Pages 521-525

  Ensinger, W ^a   Hartmann, J ^a   Klein, J ^a   Usedom, P ^a   Stritzker, B ^a   Rauschenbach, B ^a  

^a UNIVERSITY OF AUGSBURG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CATHODES; ELECTRON CYCLOTRON RESONANCE; ION IMPLANTATION; MAGNETIC FIELDS; MAGNETRON SPUTTERING; PLASMA SOURCES; PULSE GENERATORS; SOLENOIDS; THIN FILMS;

PLASMA IMMERSION ION IMPLANTATION; VACUUM CHAMBER; WATER COOLED SAMPLE HOLDER;

VACUUM TECHNOLOGY;

EID: 0029697216     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (15)