Optoelectronic properties of as-deposited and annealed P-doped microcrystalline Si films deposited by rf glow discharge

Semiconductor Science and Technology

Volumn 11, Issue 12, 1996, Pages 1882-1887

  Jayatissa, Ahalapitiya Hewage ^a,b   Yamaguchi, Tomuo ^a   Hatanaka, Yoshinori ^a  

^a SHIZUOKA UNIVERSITY   (Japan)

^b NHK SCIENCE AND TECHNICAL RESEARCH LABORATORIES   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

OPTOELECTRONIC PROPERTIES; RADIO FREQUENCY GLOW DISCHARGE METHOD; SPECTROPHOTOELLIPSOMETRY (SE);

ANNEALING; CRYSTAL MICROSTRUCTURE; DIELECTRIC PROPERTIES; GLOW DISCHARGES; OPTOELECTRONIC DEVICES; SEMICONDUCTING SILICON; SEMICONDUCTOR DOPING; THERMAL EFFECTS;

THIN FILMS;

EID: 0030397525     PISSN: 02681242     EISSN: None     Source Type: Journal    
DOI: 10.1088/0268-1242/11/12/020     Document Type: Article

References (25)

1. Takahama T, Taniguchi M, Kuroda S, Matsuyama T, Tanaka M, Tsudo S, Nakano S and Kuwano Y 1992 Proc. 11th European Photo-voltaic Conf. p 1057
2. Saha S C and Ray S 1995 J. Appl. Phys. 78 5713
3. Voutsas A T, Hatalis M K, Boyce J and Chiang A 1995 J. Appl. Phys. 78 6999
4. Shibata N, Fukada K, Ohtoshi H, Hanna J, Oda S and Shimizu I 1987 Japan. J. Appl. Phys. 26 L10
5. Suzuki K 1991 Amorphous and Macrocrystalline Devices ed J Kanicki (Boston: Artech House) p 77
6. Kakinuma H, Mohri M, Sakamoto M and Tsuruoka T 1991 J. Appl. Phys. 70 7374
7. Suzuki K, Sawada K, Jayatissa A H, Sano K, Hatanaka Y, and Ando T 1996 Extended Abstracts of the Japan Society of Applied Physics, 28a-E2, Spring Meeting, March p 597
8. Park Y B and Rhee S W 1996 Appl. Phys. Lett. 68 2219
9. Xu X, Yang Y, Banjerjee A, Guha S, Wasanth K and Wagner S 1995 Appl. Phys. Lett. 67 2323
10. Matsuda A 1983 J. Non-Cryst. Solids 59&60 767
11. Fang M and Drevillon B 1992 J. Appl. Phys. 71 5445
12. Nguyen H V and Collins R W 1993 Phys. Rev. B 47 1911
13. Yang Y H, Katiyar M, Feng G F, Maley N and Abelson J R 1994 Appl. Phys. Lett. 65 1769
14. Jayatissa A H, Nakanishi Y and Hatanaka Y 1993 Japan. J. Appl. Phys. 32 3729
15. Jayatissa A H, Hatanaka Y, Nakanishi Y and Yamaguchi T 1996 Thin Solid Films 274 113
16. Jayatissa A H, Hatanaka Y, Nakanishi Y and Ishikawa K 1996 J. Phys. D: Appl. Phys. 29 1636
17. Adachi S 1988 Phys. Rev. B 38 12 966
18. Suzuki T and Adachi S 1993 Japan. J. Appl. Phys. 32 4950
19. LeComber P G, Willeke G and Spear W E 1983 J. Non-Cryst. Solids 59&60 795
20. Seto Y W 1975 J. Appl. Phys. 46 5247
21. Mandurah M M, Saraswat K C and Kamins T I 1979 J. Electrochem. Soc. 126 1019
22. Palik E D 1991 Handbook of Optical Constants of Solids vol 1 (London: Academic)
23. Jayatissa A H, Yamaguchi T, Hatanaka Y, Nakanishi Y and Ishikawa K 1996 Appl. Surf. Sci. at press
24. Iqbal Z and Veprek S 1982 J. Phys. C: Solid State Phys. 15 377
25. Yamaguchi T, Kaneko Y, Jayatissa A H and Aoyama M 1996 Thin Solid Films 279 174