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Volumn 17, Issue 3, 1996, Pages 124-126

High speed p-type SiGe modulation-doped field-effect transistors

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL VAPOR DEPOSITION; ETCHING; GATES (TRANSISTOR); HETEROJUNCTIONS; LEAKAGE CURRENTS; SEMICONDUCTING SILICON COMPOUNDS; SEMICONDUCTOR DEVICE MANUFACTURE; SEMICONDUCTOR DEVICE STRUCTURES; SEMICONDUCTOR DOPING; SEMICONDUCTOR GROWTH; TRANSCONDUCTANCE; VACUUM APPLICATIONS;

EID: 0030109420     PISSN: 07413106     EISSN: None     Source Type: Journal    
DOI: 10.1109/55.485188     Document Type: Article
Times cited : (61)

References (18)
  • 1
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    • High-performance Si/SiGe n-type modulation-doped transistors, IEEE Electron
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    • (1993) Device Lett. , vol.14 , pp. 348
    • Ismail, K.1    Rishton, S.2    Chu, J.O.3    Chan, K.4    Meyerson, B.S.5
  • 2
    • 0026765271 scopus 로고
    • Enhancement mode n-channel Si/SiGe MODFET with high intrinsic transconductance
    • U. König, A. J. Boers, F. Schäffler, and E. Kasper, "Enhancement mode n-channel Si/SiGe MODFET with high intrinsic transconductance," Electron. Lett., vol. 28, p. 160, 1992.
    • (1992) Electron. Lett. , vol.28 , pp. 160
    • König, U.1    Boers, A.J.2    Schäffler, F.3    Kasper, E.4
  • 3
    • 0028383440 scopus 로고
    • Electron mobility enhancement in strained-Si N-type metal-oxide-semiconductor field-effect transistors
    • J. Welser, J. L. Hoyt, and J. F. Gibbons, "Electron mobility enhancement in strained-Si N-type metal-oxide-semiconductor field-effect transistors," IEEE Electron Device Lett., vol. 15, p. 100, 1994.
    • (1994) IEEE Electron Device Lett. , vol.15 , pp. 100
    • Welser, J.1    Hoyt, J.L.2    Gibbons, J.F.3
  • 6
    • 0028530427 scopus 로고
    • SiGe pMOSFET's with gate oxide fabricated by microwave electron cyclotron plasma processing
    • P. W. Li, E. S. Yang, Y. F. Yang, J. O. Chu, and B. S. Meyerson, "SiGe pMOSFET's with gate oxide fabricated by microwave electron cyclotron plasma processing," IEEE Electron Device Lett., vol. 15, p. 402, 1994.
    • (1994) IEEE Electron Device Lett. , vol.15 , pp. 402
    • Li, P.W.1    Yang, E.S.2    Yang, Y.F.3    Chu, J.O.4    Meyerson, B.S.5
  • 8
    • 0027908431 scopus 로고
    • P-type SiGe channel modulation doped field-effect transistors with post-evaporation patterned submicrometer Schottky gates
    • U. König and F. Schäffler, "P-type SiGe channel modulation doped field-effect transistors with post-evaporation patterned submicrometer Schottky gates," Electron. Lett., vol. 29, p. 486, 1993.
    • (1993) Electron. Lett. , vol.29 , pp. 486
    • König, U.1    Schäffler, F.2
  • 10
    • 0028430279 scopus 로고
    • Fabrication of a strain-controlled SiGe/Ge MODFET with ultrahigh hole mobility
    • E. Murakami, K. Nakagawa, A. Nishida, and M. Miyao, "Fabrication of a strain-controlled SiGe/Ge MODFET with ultrahigh hole mobility," IEEE Trans. Electron Devices, vol. 41, p. 857, 1994.
    • (1994) IEEE Trans. Electron Devices , vol.41 , pp. 857
    • Murakami, E.1    Nakagawa, K.2    Nishida, A.3    Miyao, M.4
  • 13
    • 0027577698 scopus 로고
    • P-type Ge channel MODFET's with high transconductance grown on Si substrates
    • U. König and F. Schäffler, "P-type Ge channel MODFET's with high transconductance grown on Si substrates," IEEE Electron Devices Lett., vol. 14, p. 205, 1993.
    • (1993) IEEE Electron Devices Lett. , vol.14 , pp. 205
    • König, U.1    Schäffler, F.2
  • 14
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    • Electron transport properties of Si/SiGe heterostructures: Measurements and device implications
    • K. Ismail, S. F. Nelson, J. O. Chu, and B. S. Meyerson, "Electron transport properties of Si/SiGe heterostructures: Measurements and device implications," Appl. Phys. Lett., vo. 63, p. 660, 1993.
    • (1993) Appl. Phys. Lett. , vol.63 , pp. 660
    • Ismail, K.1    Nelson, S.F.2    Chu, J.O.3    Meyerson, B.S.4
  • 15
    • 36449008939 scopus 로고
    • High hole mobility in SiGe alloys for device applications
    • K. Ismail, J. O. Chu, and B. S. Meyerson, "High hole mobility in SiGe alloys for device applications," Appl. Phys. Lett., vol. 64, p. 3124, 1994.
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    • Ismail, K.1    Chu, J.O.2    Meyerson, B.S.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.