The long-term charge storage mechanism of silicon dioxide electrets for microsystems

IEICE Transactions on Electronics

Volumn E79-C, Issue 10, 1996, Pages 1462-1466

  Ichiya, Mitsuo ^a   Nakamura, Takuro ^a   Nakata, Shuji ^b   Lewiner, Jacques ^c  

^a PANASONIC CORPORATION   (Japan)

^b OSAKA UNIVERSITY   (Japan)

^c PSL RESEARCH UNIVERSITY   (France)

Author keywords

Charge stability; Electret; Electron spin resonance; Plasma chemical vapor deposition; Silicon dioxide; Thermally stimulated current

Indexed keywords

CHEMICAL VAPOR DEPOSITION; ELECTRIC FIELDS; ELECTRIC SPACE CHARGE; ELECTROSTATICS; OXIDATION; PARAMAGNETIC RESONANCE; SENSORS; SILICA; STABILITY;

CHARGE STABILITY; ELECTROSTATIC FIELDS; LONG TERM CHARGE STORAGE MECHANISMS; MICROSYSTEMS; SILICON DIOXIDE ELECTRETS; THERMAL OXIDATION; THERMALLY STIMULATED CURRENT MEASUREMENT;

ELECTRETS;

EID: 0030262852     PISSN: 09168524     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (7)

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