Chemically clean air: An emerging issue in the fab environment

Semiconductor International

Volumn 19, Issue 10, 1996, Pages 115-122

  Mikulsky, John ^a  

^a Balazs Analytical Services   (United States)

Author keywords

Clean air; Contamination control; Particle measurements

Indexed keywords

CLEAN ROOMS; CONTAMINATION; INDOOR AIR POLLUTION; PARTICLES (PARTICULATE MATTER);

CLEAN AIR; CONTAMINATION CONTROL; MOLECULAR CONTAMINATION; PARTICLE MEASUREMENTS;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 0030242410     PISSN: 01633767     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (11)

1. M. Camenzind, "Identification of Organic Contamination in Cleanroom Air, on Wafers and Outgassing from Gloves and Wafer Shippers," Proceedings of Semiconductor Pure Water and Chemicals Conference, 1996, p. 352.
2. T. Fujimoto et al., "Evaluation of Contaminants in the Cleanroom Atmosphere and on Silicon Wafers," Proceedings of Semiconductor Pure Water and Chemicals Conference, 1996, p. 325.
3. J. Greiner, "Cleanrooms, the Numbers, a Review," Proceedings of Cleanrooms West 1993, p. 18.
4. A. Muller et al., "Volatile Cleanroom Contaminants; Sources and Detection," Solid State Technology, September 1994, p. 61.
5. Balazs News, December 1995.
6. M. Tamaoki et al., "The Effect of Airborne Contaminants in the Cleanroom for ULSI Manufacturing Process," Proceedings of 1995 IEEE/SEMI Advanced Semiconductor Manufacturing Conference, p. 322.
7. The National Technology Roadmap for Semiconductors, Semiconductor Industry Association, 1994.
8. K.R. Dean and R.A. Carpio, "Contamination of Positive Deep UV Photoresists," Proceedings of Interface '94, November 1994.
9. E. Mori et al., "Correlating Organophosphorus Contamination on Wafer Surfaces with HEPA Filter Installation," Microcontamination, November 1992, p. 35.
10. M. Balazs et al., "Cleanroom Air Monitoring Using Scrubbing and Adsorption Methodologies," Proceedings of the Institute of Environmental Sciences, 1995.
11. M.J. Camenzind et al., "How Clean is Your Cleanroom Air?" Micro, October 1995.