Fabrication and characterization of PZT thin films for micromotors

International Conference on Solid-State Sensors and Actuators, and Eurosensors IX, Proceedings

Volumn 1, Issue , 1995, Pages 397-400

  Muralt, Paul ^a   Kholkin, Andrei ^a   Kohli, Markus ^a   Maeder, Thomas ^a   Brooks, Keith G ^a   Luthier, R ^a   Setter, N ^a  

^a EPFL   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

CHARACTERIZATION; CHEMICAL VAPOR DEPOSITION; ELECTRODES; FABRICATION; LEAD COMPOUNDS; MOTORS; NATURAL FREQUENCIES; OXIDES; PIEZOELECTRIC MATERIALS; SILICON WAFERS; STATORS; ULTRASONIC EQUIPMENT;

DEPOLARIZATION; LEAD ZIRCONIUM TITANATE; LOW PRESSURE CHEMICAL VAPOR DEPOSITION; MICROMOTORS; PIEZOELECTRIC MEMBRANES; THERMAL OXIDE;

THIN FILMS;

EID: 0029519837     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (15)