Wobble motor: an electrostatic, planetary-armature, microactuator.

Volumn , Issue , 1989, Pages 17-24

  Jacobsen, S C ^a   Price, R H ^a   Wood, J E ^a   Rytting, T H ^a   Rafaelof, M ^a  

^a UNIVERSITY OF UTAH   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; ELECTRIC DISCHARGES; LITHOGRAPHY--PHOTOLITHOGRAPHY;

ELECTRO-DISCHARGE MACHINING; MICROACTUATOR; PHOTOLITHOGRAPHIC ETCHING; STALL TORQUE; WOBBLE MOTOR;

ELECTRIC MOTORS;

EID: 0024860958     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (22)