Equilibrium constant of segregation-induced Fe gettered by heavy boron doping in Si

Journal of Applied Physics

Volumn 84, Issue 3, 1998, Pages 1279-1283

  Tobe, Satoshi ^a   Hayamizu, Yoshinori ^a   Kitagawara, Yutaka ^a  

^a SHIN ETSU CHEMICAL CO LTD   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0013291430     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.368195     Document Type: Article

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