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Volumn 290, Issue 1-2, 1999, Pages 273-278

The influence of the growth conditions on the structural and optical properties of hydrogenated amorphous silicon carbide thin films

Author keywords

Amorphous SiC alloys; Film structures

Indexed keywords

AMORPHOUS FILMS; ENERGY GAP; FILM GROWTH; HYDROGENATION; OPTICAL PROPERTIES; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION;

DISORDERED NETWORKS; OPTICAL BAND GAP;

SILICON CARBIDE;

EID: 0013023510 PISSN: 09258388 EISSN: None Source Type: Journal
DOI: 10.1016/S0925-8388(99)00206-6 Document Type: Article

Times cited : (36)

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