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Volumn 123-124, Issue , 1998, Pages 11-16
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Formation of the interface between c-Si(111) and diamond-like carbon studied with photoelectron spectroscopy
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Author keywords
Band bending; Band offset; Photoelectron spectroscopy; Silicon carbon interface
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Indexed keywords
AMORPHOUS FILMS;
CARBON;
DEPOSITION;
ELECTRONIC PROPERTIES;
FILM GROWTH;
PASSIVATION;
PHOTOELECTRON SPECTROSCOPY;
PLASMA APPLICATIONS;
SILICON;
SILICON CARBIDE;
STOICHIOMETRY;
SUBSTRATES;
PLASMA DEPOSITION;
INTERFACES (MATERIALS);
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EID: 4243781936
PISSN: 01694332
EISSN: None
Source Type: Journal
DOI: 10.1016/S0169-4332(97)00497-2 Document Type: Article |
Times cited : (10)
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References (16)
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