Nonprobe radio-frequency plasma diagnostics method based on the power balance in an asymmetric capacitively coupled discharge

Journal of Applied Physics

Volumn 87, Issue 7, 2000, Pages 3263-3269

  Mateev, Emil ^a   Zhelyazkov, Ivan ^b  

^a SILWAY Semiconductors Ltd   (Bulgaria)

^b UNIVERSITY OF SOFIA   (Bulgaria)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0012627763     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.372334     Document Type: Article

References (21)

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