Dry etching of GaSb and InSb in CH4/H2/Ar

Semiconductor Science and Technology

Volumn 12, Issue 3, 1997, Pages 338-344

  Mileham, J R ^a   Lee, J W ^a   Lambers, E S ^a   Pearton, S J ^a  

^a UNIVERSITY OF FLORIDA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0012584348     PISSN: 02681242     EISSN: None     Source Type: Journal    
DOI: 10.1088/0268-1242/12/3/016     Document Type: Article

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