Neutron intrinsic gettering on electrical property of gate oxynitride in metal-oxide-Si capacitor

Applied Physics Letters

Volumn 76, Issue 19, 2000, Pages 2770-2772

  Chang Liao, Kuei Shu ^a   Yi, Nan Kuang ^a   Huang, Jenn Gwo ^b  

^a NATIONAL TSING HUA UNIVERSITY   (Taiwan)

^b TAIWAN POWER COMPANY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0012312223     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.126470     Document Type: Article

References (7)

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