Accurate infrared spectroscopy determination of interstitial and precipitated oxygen in highly doped Czochralski-grown silicon

Review of Scientific Instruments

Volumn 70, Issue 9, 1999, Pages 3661-3663

  De Gryse, O ^a   Clauws, P ^a   Rossou, L ^b   Van Landuyt, J ^b   Vanhellemont, J ^c  

^a GHENT UNIVERSITY   (Belgium)

^b UNIVERSITY OF ANTWERP   (Belgium)

^c SILTRONIC AG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0012283364     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1149974     Document Type: Article

References (17)

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