Micromechanical pierce oscillator for resonant sensing applications

2002 International Conference on Modeling and Simulation of Microsystems - MSM 2002

Volumn , Issue , 2002, Pages 162-165

  Seshia, Ashwin A ^a   Low, Wing Zin ^a   Bhave, Sunil A ^a   Howe, Roger T ^a   Montague, Stephen ^b  

^a UNIVERSITY OF CALIFORNIA   (United States)

^b SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

Micromechanical oscillator; Pierce circuit; Resonant sensing; Resonator

Indexed keywords

ATOMIC FORCE MICROSCOPY; CAPACITANCE; CMOS INTEGRATED CIRCUITS; COMPOSITE MICROMECHANICS; NETWORKS (CIRCUITS); PIERCING; RESONATORS; VLSI CIRCUITS;

MICROMECHANICAL OSCILLATOR; PIERCE CIRCUITS; RESONANT SENSING; RESONATING ELEMENTS;

ELECTROMECHANICAL DEVICES;

EID: 0012096617     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)

1. T. Roessig et al., Surface-micromachined resonant accelerometer, Ninth International Conference in Solid State Sensors and Actuators, 1997, pp. 859-862.
2. C. Nguyen et al., An Integrated CMOS Micromechanical Resonator High-Q Oscillator, IEEE Journal of Solid State Circuits, Vol. 34, No. 4, April 1999, pp. 440-455.
3. T. Roessig et al., Surface-Micromachined 1MHz Oscillator With Low-Noise Pierce Configuration, Proc. Solid State Sensors and Actuators Workshop, Hilton Head 1998, pp. 328-332.
4. S. Lee et al., A 10-MHz Micromechanical Resonator Pierce Reference Oscillator for Communications, Proc. Eleventh International Conference in Solid State Sensors and Actuators, 2001, pp. 1094-7.
5. T. Gabrielson et al., Mechanical-thermal noise in micromachined acoustic and vibration sensors, IEEE Transactions on Electron Devices, vol.40, no.5, May 1993, pp. 903-9.
6. J. Smith et al., Embedded micromechanical devices for the monolithic integration of MEMS with CMOS, IEDM Tech. Digest, 1995, pp. 609-612.