Ellipsometric investigations of the refractive index depth profile in PZT thin films

Physica Status Solidi (A) Applied Research

Volumn 188, Issue 4, 2001, Pages 1549-1552

  Deineka, A ^a   Jastrabik, L ^a   Suchaneck, G ^b   Gerlach, G ^b  

^a INSTITUTE OF PHYSICS   (Czech Republic)

^b DRESDEN UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0012053617     PISSN: 00318965     EISSN: None     Source Type: Journal    
DOI: 10.1002/1521-396X(200112)188:4<1549::AID-PSSA1549>3.0.CO;2-D     Document Type: Article

References (15)

1. G. SUCHANECK, W.-M. LIN, R. KOEHLER, T. SANDNER, G. GERLACH, R. KRAWIETZ, W. POMPE, A. DEINEKA, and L. JASTRABIK, Vacuum (2001), in print.
2. D. DIMOS, W. L. WARREN, M. B. SINCLAIR, B. A. TUTTLE, and R. W. SCHWARTZ, J. Appl. Phys. 76, 4305 (1994).
3. G. E. PIKE, W. L. WARREN, D. DIMOS, B. A. TUTTLE, R. RAMESH, J. LEE, V. G. KERAMIDAS, and J. T. EVANS, JR., Appl. Phys. Lett. 66, 484 (1995).
4. J. LEE and R. RAMESH, Appl. Phys. Lett. 68, 484 (1996).
5. A. DEINEKA, M. GLINCHUK, L. JASTRABIK, G. SUCHANECK, T. SANDNER, and G. GERLACH, Ferroelectrics (2001), in print.
6. A. M. BRATKOVSKI and A. P. LEVANYUK, Phys. Rev. B 61, 15042 (2000).
7. R. TAKAYAMA, Y. TOMITA, K. IIJIMA, and I. UEDA, Ferroelectrics 118, 325 (1991).
8. I. KANNO, T. KAMADA, S. HAYASHI, M. KITAGAWA, and T. HIRAO, Jpn. J. Appl. Phys. 32, L950 (1993).
9. S. NAGAO, T. TAGEUCHI, and K. IIJIMA, Jpn. J. Appl. Phys. 32, 1065 (1993).
10. J.-J. SHYU and P.-CH. LEE, Jpn. J. Appl. Phys 35, 3954 (1996).
11. R. M. A. AZZAM and N. M. BASHARA, Ellipsometry and Polarized Light, North-Holland Publ. Co., Amsterdam 1977.
12. F. ABELES, Nat. Bur. Stand. 256, 41 (1963).
13. V. I. PSHENITSIN, M. I. ABAEV, and N. YU. LYZLOV, Ellipsometry in Physico-Chemistry Investigations, Chemistry, St. Petersburg 1986.
14. J. RIVORY, Thin Solid Films 313/314, 333 (1998).
15. A. DEINEKA, M. GLINCHUK, L. JASTRABIK, G. SUCHANECK, and G. GERLACH, phys. stat sol. (a) 175, 443 (1999).