Ultra-clean sputtering process for magnetic thin films on hard disk drives

Vacuum

Volumn 59, Issue 2-3, 2000, Pages 814-824

  Takahashi, Migaku ^a   Tsunoda, M ^a   Shoji, H ^a  

^a TOHOKU UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0012017930     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0042-207x(00)00352-3     Document Type: Article

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