The ultra clean sputtering process and high density magnetic recording media

IEEE Transactions on Magnetics

Volumn 33, Issue 5 PART 1, 1997, Pages 2938-2943

  Takahashi, Migaku ^a   Kikuchi, Akira ^a   Kawakita, Shinya ^a  

^a TOHOKU UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

COBALT ALLOYS; COERCIVE FORCE; CRYSTAL MICROSTRUCTURE; MAGNETIC ANISOTROPY; MAGNETIC HYSTERESIS; MAGNETIC RECORDING; METALLIC FILMS; SPUTTER DEPOSITION;

ULTRA CLEAN SPUTTERING PROCESS;

MAGNETIC FILM STORAGE;

EID: 0031223501     PISSN: 00189464     EISSN: None     Source Type: Journal    
DOI: 10.1109/20.617804     Document Type: Article

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