Design and fabrication of Si/SiGe n-type MODFETs

Physica E: Low-Dimensional Systems and Nanostructures

Volumn 2, Issue 1-4, 1998, Pages 763-767

  Gluck M ^a   Hackbarth, T ^a   Birk, M ^b   Haas, A ^b   Kohn, E ^b   Konig U ^a  

^a DAIMLER AG   (Germany)

^b UNIVERSITY OF ULM   (Germany)

Author keywords

Molecular beam epitaxy; SiGe heterodevices; SiGe heterostructures; SiGe MODFET

Indexed keywords

EID: 0011648282     PISSN: 13869477     EISSN: None     Source Type: Journal    
DOI: 10.1016/S1386-9477(98)00156-8     Document Type: Article

References (7)

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