Ion beam deposition of permanent magnet layers for liftoff processes

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 17, Issue 5, 1999, Pages 2186-2190

  Devasahayam, Adrian J ^a  

^a VEECO INSTRUMENTS INC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 24644473739     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (3)

1. C. H. Bajorek and D. A. Thompson, IEEE Trans. Magn. 11, 1209 (1975).
2. T. Lin, G. L. Gorman, and C. Tsáng, IEEE Trans. Magn. 32, 3443 (1996).
3. M. Xiao, A. J. Devasahayam, and M. H. Kryder, IEEE Trans. Magn. 34, 1945 (1998).