Laser microwave photoconductance studies of ultraviolet-irradiated silicon wafers: Effect of metallic contamination

Journal of the Electrochemical Society

Volumn 145, Issue 1, 1998, Pages 329-332

  Lee, W P ^a   Khong, Y L ^a  

^a SHIN ETSU CHEMICAL CO LTD   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CHARGE CARRIERS; ELECTRON ENERGY LEVELS; PHOTOCONDUCTIVITY; SURFACE TREATMENT; ULTRAVIOLET RADIATION;

LASER MICROWAVE PHOTOCONDUCTANCE; MINORITY CARRIER RECOMBINATION LIFETIMES;

SILICON WAFERS;

EID: 0031649498     PISSN: 00134651     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.1838254     Document Type: Article

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