Surface roughness-induced artifacts in secondary ion mass spectrometry depth profiling and a simple technique to smooth the surface

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 14, Issue 6, 1996, Pages 3593-3595

  Herner, S B ^a   Gila, B P ^a   Jones, K S ^a   Gossmann, H J ^b   Poate, J M ^b   Luftman, H S ^b  

^a University of Florida   (United States)

^b LUCENT TECHNOLOGIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0009596955     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.588731     Document Type: Article

References (13)

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