The feasibility of an XPS expert system demonstrated by a rule set for carbon contamination

Journal of Electron Spectroscopy and Related Phenomena

Volumn 105, Issue 2-3, 1999, Pages 245-256

  Castle, J E ^a   Baker, M A ^a  

^a Sch of Mech and Mat Engineering   (United Kingdom)

Author keywords

Carbon contamination; Data processing; Expert system; Surface analysis; XPS

Indexed keywords

EID: 0008678662     PISSN: 03682048     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0368-2048(99)00065-1     Document Type: Article

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