Mo/Y multilayer mirrors for the 8–12-nm wavelength region

Optics Letters

Volumn 19, Issue 13, 1994, Pages 1004-1006

  Montcalm, Claude ^a   Sullivan, Brian T ^a   Ranger, M ^a   Slaughter, J M ^b   Kearney, Patrick A ^b   Falco, Charles M ^b   Chaker, M ^c  

^a NATIONAL RESEARCH COUNCIL CANADA   (Canada)

^b UNIVERSITY OF ARIZONA   (United States)

^c INRS EMT   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

AUGER DEPTH PROFILING; MOLYBDENUM YTTRIUM MIRRORS; MULTILAYER MIRRORS; PEAK REFLECTANCE;

CHARACTERIZATION; MICROSCOPIC EXAMINATION; OPTICAL MULTILAYERS; OPTICAL VARIABLES MEASUREMENT; SPUTTER DEPOSITION;

MIRRORS;

EID: 0028478628     PISSN: 01469592     EISSN: 15394794     Source Type: Journal    
DOI: 10.1364/OL.19.001004     Document Type: Article

References (7)

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3. F. R. de Boer, R. Boom, W. C. M. Mattens, A. R. Miedema, and A. K. Niessen, Cohesion in Metals: Transition Metal Alloys (North-Holland, New York, 1988), p. 344.
4. B. L. Henke, E. M. Gullikson, and J. C. Davis, At. Nucl. Data Tables 54, 181 (1993).
5. C. Montcalm, B. T. Sullivan, H. Pépin, J. A. Dobrowolski, and M. Sutton, Appl. Opt. 33, 2057 (1994).
6. J. P. McCaffrey, Microsc. Res. Technol. 24, 180 (1993).
7. D. Makowiecki, C. Alford, K. Skulina, J. B. Kortright, R. Soufli, E. M. Gullikson, and J. H. Underwood, in Physics of X-Ray Multilayer Structures, Vol. 6 of 1994 OSA Technical Digest Series (Optical Society of America, Washington, D.C., 1994), paper PD2.