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Fabrication of high-reflectance Mo-Si multilayer mirrors by planar magnetron sputtering
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D. G. Stearns, R. S. Rosen, and S. R. Vernon, "Fabrication of high-reflectance Mo-Si multilayer mirrors by planar magnetron sputtering," J. Vac. Sci. Technol. A (to be published).
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6
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0000992319
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A. K. Petford-Long, M. B. Stearns, C.-H. Chang, S. R. Nutt, D. G. Stearns, N. M. Ceglio, and A. M. Hawryluk, J. Appl. Phys. 61, 1422 (1987).
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7
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M. Kuhne, K. Danzmann, P. Muller, B. Wende, N. M. Ceglio, D. G. Stearns, and A. M. Hawryluk, Proc. Soc. Photo-Opt. Instrum. Eng. 688, 76 (1986).
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Stearns, D.G.6
Hawryluk, A.M.7
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