Nitrogen incorporation and trace element analysis of nanocrystalline diamond thin films by secondary ion mass spectrometry

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 17, Issue 4, 1999, Pages 1135-1140

  Zhou, D ^a,d   Stevie, F A ^b   Chow, L ^a   McKinley, J ^b   Gnaser, H ^c   Desai, V H ^a,d  

^a UNIVERSITY OF CENTRAL FLORIDA   (United States)

^b Cirent Semiconductor   (United States)

^c Rheinland Pfälzische Technische Universität Kaiserslautern Landau   (Germany)

^d University of Central Florida   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0008124349     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.581786     Document Type: Article

References (29)

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