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Volumn , Issue , 1997, Pages

Design, analysis and fabrication of a vaporizing liquid micro-thruster

Author keywords

[No Author keywords available]

Indexed keywords

ATTITUDE CONTROL; CHIP SCALE PACKAGES; FABRICATION; LIQUIDS; NASA; PROPULSION; TRACKING (POSITION);

EID: 84962783049     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper
Times cited : (30)

References (8)
  • 2
  • 4
    • 0020127035 scopus 로고
    • Silicon as a Mechanicla Material
    • May
    • Peterson, K., "Silicon as a Mechanicla Material", Proceedings of the IEEE, Vol. 70, No. 5, pp. 420-457, May 1982.
    • (1982) Proceedings of the IEEE , vol.70 , Issue.5 , pp. 420-457
    • Peterson, K.1
  • 7
    • 0016496213 scopus 로고
    • Optimization of the Hydrazine-Water Solution for Anisotropic Etching od Silicon in Integrated Circuit Technology
    • April
    • Declercg, M.J., Gerzberg, L., and Meindl, J.D., "Optimization of the Hydrazine-Water Solution for Anisotropic Etching od Silicon in Integrated Circuit Technology", J.Electrochem.Soc., Vol.122, No. 4, pp. 545-552, April 1975.
    • (1975) J.Electrochem.Soc , vol.122 , Issue.4 , pp. 545-552
    • Declercg, M.J.1    Gerzberg, L.2    Meindl, J.D.3
  • 8
    • 0022238888 scopus 로고
    • Micromachining and Micropackaging of Transducers, edited by C.D. Fung, P.W. Cheung, W.H. Ko and D.G. Fleming, Elsevier Science Publ., Amsterdam
    • Ko, W.H., Suminto, J.T., and Yen, G.J., "Bonding Techniques for Microsensors", Micromachining and Micropackaging of Transducers, edited by C.D. Fung, P.W. Cheung, W.H. Ko and D.G. Fleming, Elsevier Science Publ., Amsterdam 1985, p. 41-61.
    • (1985) Bonding Techniques for Microsensors , pp. 41-61
    • Ko, W.H.1    Suminto, J.T.2    Yen, G.J.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.