Structural analysis of interfacial layers in Ti/Ta/Al ohmic contacts to n-AlGaN

Journal of Applied Physics

Volumn 88, Issue 11, 2000, Pages 6364-6368

  Lim, S H ^a   Swider, W ^a   Washburn, J ^a   Liliental Weber, Z ^a  

^a LAWRENCE BERKELEY NATIONAL LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0006409658     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1323517     Document Type: Article

References (13)

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