Influence of Substrate and Film Thickness on The Morphology and Diamond Bond Formation During the Growth of Amorphous Diamond-like Carbon (DLC) Films

Journal of Optoelectronics and Advanced Materials

Volumn 1, Issue 4, 1999, Pages 65-68

  Maharizi, M ^a   Peleg, D ^a   Seidman, A ^a   Croitoru, N ^a  

^a TEL AVIV UNIVERSITY   (Israel)

Author keywords

Amorphous; Atomic force microscopy; Diamond like carbon; Infrared spectroscopy; Roughness

Indexed keywords

AMORPHOUS MATERIALS; ATOMIC FORCE MICROSCOPY; CARBON FILMS; DIAMONDS; FILM GROWTH; FOURIER TRANSFORM INFRARED SPECTROSCOPY; INFRARED SPECTROSCOPY; MORPHOLOGY; SUBSTRATES; SURFACE ROUGHNESS;

BOND FORMATION; DIAMOND LIKE CARBON; DIAMOND-LIKE FILM; FILM MORPHOLOGY; FILM ROUGHNESS; FOURIER; SUBSTRATE TYPES;

DIAMOND LIKE CARBON FILMS;

EID: 0005520687     PISSN: 14544164     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (19)

1. Tamor M., Gels M. W., Encyclopedia of Applied Physics, VCH Publisher 5,10(1993).
2. Chhowalla M., Amaratunga G. A. J., Yin Y., McKenzie D. R., Frauenheim Th., Diamond and Related Mat. 6(2-4), 207(1997).
3. Robertson J., J. Non-Cryst. Solids 198-200, 615(1996).
4. Feldman A., Proc. 3rd Internl. Diamond Conf., National Institute of Technology, Gaithersburg, MD, U.S.A., August 21-24, 797(1995).
5. Grill A., Diamond and Related Materials 8, 428(1999).
6. Alaluf M., Appelbaum J., Klibanov L., Brinker D., Scheiman D., Croitoru N., Thin Solid Films 1, 256(1995).
7. Allon-Alaluf M., Appelbaum J., Maharizi M., Seidman A., Croitoru N., Thin Solid Films 303, 273 (1997).
8. Fourches N., Turban G., Thin Solid Films, 28, 240(1994).
9. Shirai H., Das D., Jun-ichi Hanna, Shimizu I., Appl. Phys. Lett. 59, 1096(1991).
10. Jim Xu, Myiazaki S., Hirose M., Jap. J. Appl. Phys. 34, 203(1995).
11. Knights J.C., J. Non-Crystalline Solids 35-36, 159(1980).
12. Klibanov L., Inberg A., Croitoru N., Seidman A., Scheffer L., Ben-Jacob E., Diamond and Related Materials 7, 807(1998).
13. Allon-Alaluf M., Klibanov L., Croitoru N., Diamond and Related Materials 5, 1497(1996).
14. Allon-Alaluf M., Croitoru N., J. Diamond and Related Materials 6, 555(1997).
15. Amir O., Kalish R., J. Appl. Phys. 70, 4958(1991).
16. Grill A., Patel V., Cohen S., Diamond and Related Materials 3, 281(1994).
17. Suva S., Aramatunga G., Thin Solid Films 270, 194(1995).
18. th Conf. of IEEE, Israel, 191(1995).
19. Maharizi M., Rosenwaks Y., Meoded T., Scheffer L., Ben-Jacob E., Croitoru N., Seidman A. J., Diamond and Related Materials 8, 1050(1999).