Investigation of Micro-scale Materials Behavior with MEMS

ASME International Mechanical Engineering Congress and Exposition, Proceedings (IMECE)

Volumn 1999-W, Issue , 1999, Pages 283-288

  Haque, M A ^a   Saif, M T A ^a  

^a University of Illinois at Urbana Champaign   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

HEAT TRANSFER; MEMS;

COMB-DRIVE ACTUATOR; ENVIRONMENTAL CONDITIONS; FORCES MEASUREMENTS; FREE STANDING POLYMERS; FREE STANDINGS; MATERIAL BEHAVIOUR; MULTI-LAYERED; SEM AND TEM; SUBMICRON SCALE; UNIAXIAL TENSIONS;

TENSILE TESTING;

EID: 0005487091     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1115/IMECE1999-0281     Document Type: Conference Paper

References (8)

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