Controlled growth of yttrium oxysulphide thin films by atomic layer deposition

Materials Science Forum

Volumn 315-317, Issue , 1999, Pages 216-221

  Kukli, K ^a,b   Peussa, M ^a   Johansson, L S ^a   Nykanen E ^a,c   Niinisto L ^a  

^a AALTO UNIVERSITY   (Finland)

^b UNIVERSITY OF TARTU   (Estonia)

^c Neopoli Ltd   (Finland)

Author keywords

Atomic Layer Epitaxy; Diketonate Precursor; Thin Films; Yttrium Oxysulfide

Indexed keywords

EID: 0005354242     PISSN: 02555476     EISSN: 16629752     Source Type: Book Series    
DOI: 10.4028/www.scientific.net/msf.315-317.216     Document Type: Article

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