Transferable silicon nitride microcavities

Microelectronics Journal

Volumn 31, Issue 7, 2000, Pages 523-529

  Winchester, K ^a   Spaargaren, S M R ^a   Dell, J M ^a  

^a UNIVERSITY OF WESTERN AUSTRALIA   (Australia)

Author keywords

Micro electro mechanical systems; Microcavities; Silicon nitride

Indexed keywords

EID: 0005321754     PISSN: 00262692     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0026-2692(00)00025-2     Document Type: Article

References (11)

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