Design and fabrication of soft X-ray multilayer for broadband reflection

Chinese Science Bulletin

Volumn 44, Issue 21, 1999, Pages 1953-1956

  Wang, Zhanshan ^a   Ke, Changjun ^b   Ma, Yueying ^a   Zhang, Tieqiang ^b   Cao, Jianlin ^a   Chen, Xingdan ^a  

^a CHANGCHUN INSTITUTE OF OPTICS   (China)

^b JILIN UNIVERSITY   (China)

Author keywords

Magnetron sputtering; Multilayer; Random number; Reflectance; Soft X ray

Indexed keywords

EID: 0005197631     PISSN: 10016538     EISSN: None     Source Type: Journal    
DOI: 10.1007/BF02887116     Document Type: Article

References (5)

1. Spiller, E., Soft X-Ray Optics, Bellingham, Washington: SPIE Optical Engineering Press, 1994.
2. Vernon, S. P., Stearns, D. G., Rosen, R. S., Chirped multilayer coatings for increased X-ray throughput, Opt. Lett., 1993, 18(9): 672.
3. Seely, J. F., Kowalski, M. P., Hunter, W. R. et al., Reflectance of a wideband multilayer X-ray mirror at normal and grazing incidences, Appl. Opt., 1996, 35(22): 4408.
4. Van Loevezijn, P., Schlatmann, R., Verhoeven, J. et al., Numerical and experimental study of disordered multilayers for broadband X-ray reflection, Appl. Opt. , 1996, 35(9): 3614.
5. Wang, Z. S., Wang, Z., Chen, B. et al., Large area transmission grating spectrograph with high collecting efficiency and good spatial resolution, Proc. SPIE, 1998, 3443: 17.